CHIP-SCALE SILICON-BASED HYBRID-INTEGRATED LIDAR SYSTEM

摘要

A chip-scale silicon-based hybrid-integrated LiDAR system, wherein a transmitting end thereof sequentially comprises a narrow-linewidth tunable laser source, a silicon-nitride-based beam splitter, a silicon-based phase shifter array and a silicon-nitride-based unidirectional transmitting antenna array w.r.t the optical path. Based on the principle of reciprocity of light propagation, the receiving end thereof sequentially comprises a silicon nitride unidirectional receiving antenna array, a silicon nitride beam splitter and a silicon-based coherent receiving module. It also comprises a backup system and an electric controller as the driver of the phase shifters and the processing module. Modules on the silicon platform and the silicon nitride platform are monolithic integrated in a multilayer sandwiched fashion by means of a tapered silicon/silicon nitride evanescent inter-layer coupler; and a gain chip in the tunable laser module and a silicon nitride waveguide are hybrid-integrated by horizontal coupling.