Parameter design support device and parameter design support method

摘要

PROBLEM TO BE SOLVED: To provide a parameter design support device supporting parameter design so as to reduce the load on an operator.;SOLUTION: A parameter design support device 2 comprises a storage unit 24 and a control unit 25. The storage unit 24 stores recipes for controlling a substrate processing device 1. The control unit 25 acquires at least one standard value of each of a plurality of control factors. The standard value indicates conditions when the substrate processing device 1 processes a substrate 11. The control unit 25 generates combination information indicating combinations of the acquired standard values in a statistical method. The control unit 25 creates an evaluation recipe per combination of standard values on the basis of the recipes stored in the storage unit 24 and the combination information. When the evaluation recipe contains the parameter corresponding to the control factor, the control unit 25 sets a standard value of the corresponding control factor as a parameter value of the parameter.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT