High purity tungsten hexacarbonyl for solid source delivery

摘要

A solid source material for forming a tungsten-containing film is described. The solid source material is tungsten hexacarbonyl and the molybdenum content is less than 1000 ppm. Such a solid source material provides a particulate tungsten hexacarbonyl raw material of particles having a diameter of less than 5 mm, wherein particles having a diameter of more than 1.4 mm are less than 15% of the particles, and the molybdenum content Providing the raw material having a concentration of less than 1000 ppm and sintering the particulate tungsten hexacarbonyl raw material at a temperature of less than 100 ° C. to produce a solid source material as a sintered solid. be able to. [Selection] Figure 1