HIGH-PURITY TUNGSTEN HEXACARBONYL FOR SOLID SOURCE DELIVERY

摘要

Solid source materials for forming tungsten-containing films are described. The solid source material is tungsten hexacarbonyl, where the molybdenum content is less than 1000 ppm. This solid source material comprises the steps of providing particulate tungsten hexacarbonyl raw material particles of size less than 5 mm (wherein particles of size greater than 1.4 mm are less than 15% of the particles, and the content of molybdenum is less than 1000 ppm) and It may be formed by a process comprising sintering the particulate tungsten hexacarbonyl raw material particles at a temperature below 100° C. to produce the solid source material as a sintered solid.