Analysis of multiple X-ray spectra using fitting

摘要

To provide a method of analysis of X-ray spectra with X-ray fluorescence.SOLUTION: A measured sample spectrum is fitted using a combination of a measured reference spectrum with one calculated function. The method includes measuring a reference spectrum as a plurality of measured values Rpr(i) for a plurality of energy bins i from a reference sample; selecting npr regions of interest indexed by j corresponding to a plurality of bins i, and recording profiles for the respective plurality of bins from the measured reference spectrum; measuring a sample spectrum as a plurality of intensity values R(i) for a plurality of energy bins i; and fitting the measured sample spectrum R(i) to a fit function, which includes at least one profile in at least one respective region of interest and includes at least one calculated function.SELECTED DRAWING: Figure 1