Analysis of X-ray spectra using fitting

摘要

A method of analysis of X-ray spectra in an instrument fits a measured sample spectrum using a combination of at least one measured reference spectrum with at least one calculated function. The method includes measuring a reference spectrum as a plurality of measured values R_pr(i) for a plurality of energy bins i from at least one reference sample; selecting n_pr region or regions of interest indexed by j corresponding to a plurality of bins i and recording the profile R_pr^j(i) for the respective plurality of bins from the measured reference spectrum, where n_pr is a positive integer; measuring a sample spectrum as a plurality of intensity values R_spe(i) for a plurality of energy bins i; and fitting the measured sample spectrum R_spe(i) to a fit function including the at least one profile R_pr^j(i) in at least one respective region of interest as well as at least one calculated function R_gr^j(i).