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System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage
System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage
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机译:使用较低的有效像素增强数据处理吞吐量的系统和方法,同时保持晶片横报覆盖
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摘要
An inspection system is disclosed. In one embodiment, the inspection system includes an interferometer sub-system configured to acquire an interferogram of a sample. The inspection system may further include a controller communicatively coupled to the interferometer sub-system. The controller is configured to: receive the interferogram from the interferometer sub-system; generate a phase map of the sample based on the received interferogram, wherein the phase map includes a plurality of pixels; select a sub-set of pixels of the plurality of pixels of the phase map to be used for phase unwrapping procedures; perform one or more phase unwrapping procedures on the sub-set of pixels of the phase map to generate an unwrapped phase map; and generate a surface height map of the sample based on the unwrapped phase map.
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