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Closed-loop control of a scanner with frequency-space analysis of a system deviation
Closed-loop control of a scanner with frequency-space analysis of a system deviation
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机译:系统偏差频率空间分析扫描仪的闭环控制
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摘要
The invention is based on the object of providing a particularly reliable closed-loop control for a scanner. According to various examples, this object is achieved by an analysis of a system deviation in the frequency space. By way of example, an input signal, which is indicative of a time dependence of the system deviation between an ACTUAL pose and a TARGET pose of a deflection unit of the scanner, can be expanded into a multiplicity of error components and a plurality of frequencies. Then, a corresponding correction signal component can be determined for each of the multiplicity of error components. By way of example, such techniques can be used in a laser scanning microscope.
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