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Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities
Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities
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机译:超声换能器空腔吸收材料的制造技术和结构
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摘要
A method of forming an ultrasonic transducer device includes bonding a membrane to a substrate to form a sealed cavity between the membrane and the substrate. The exposed surface located inside the sealed cavity comprises a getter material electrically insulated from the bottom electrode of the cavity.
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