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SILICONE-BASED GRAFT COPOLYMER, PRESSURE-SENSITIVE ADHESIVE COMPOSITION, PRESSURE-SENSITIVE ADHESIVE TAPE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
SILICONE-BASED GRAFT COPOLYMER, PRESSURE-SENSITIVE ADHESIVE COMPOSITION, PRESSURE-SENSITIVE ADHESIVE TAPE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
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机译:基于硅氧烷的接枝共聚物,压敏粘合剂组合物,压敏粘合带和制造半导体器件的方法
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摘要
A purpose of the present invention is to provide a silicone-based graft copolymer able to form a pressure-sensitive adhesive layer which is unlikely to delaminate even if subjected to a high temperature heat treatment and which can increase adhesion and suppress contamination of an adherend. Another purpose of the present invention is to provide: a pressure-sensitive adhesive composition and a pressure-sensitive adhesive tape that contain the silicone-based graft copolymer; and a method for producing a semiconductor device. The present invention is a silicone-based graft copolymer which has a structure derived from a polar functional group-containing monomer and a structure derived from a silicone macromonomer, has a glass transition temperature, as measured using differential scanning calorimetric measurements, of 30ºC or lower, and has a 5% weight loss temperature, as measured at a temperature increase rate of 10ºC/min using a device for simultaneously measuring differential heat and thermogravimetric weight, of 300ºC or higher.
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