High purity crystalline powder generating apparatus for large area perovskite solar cell module using plasma, spraying apparatus and collecting apparatus using the same

摘要

The present invention relates to an apparatus for generating high-purity crystalline powder for a large-area perovskite solar cell module using plasma, a spraying apparatus and a collecting apparatus using the same. In the apparatus for generating high purity crystalline powder according to the present invention, after the source gas is supplied to the reaction tube, the source gas is converted into plasma while passing through the section of the reaction tube in which the inductively coupled plasma coil is installed, and the plasma is the refrigerant under the inductively coupled plasma coil. It is converted into high-purity crystalline powder while passing through the section of the reaction tube where the circulation line is installed. The high-purity crystalline powder may be deposited as a perovskite thin film on the target substrate by being sprayed at high speed by the injection orifice at the bottom of the reaction tube. Alternatively, the high-purity crystalline powder may be collected by a collecting orifice at the bottom of the reaction tube.