Vacuum heat treatment device for foil base material, heat treatment method for foil base material

摘要

PROBLEM TO BE SOLVED: To provide a vacuum heat treatment apparatus for a foil base material capable of continuously heat-treating a base material made of a metal foil with high processing accuracy, and a heat treatment method for the foil base material. A vacuum heat treatment apparatus 1 includes a vacuum chamber, a winding shaft 12, a winding shaft 46, at least a pair of front and back heaters 22, and at least a pair of front and back cooling panels 23 of a base material. The foil base material W is conveyed in the vacuum chamber along the processing path from the unwinding shaft 12 to the winding shaft 46. The heater 22 is arranged to face the front surface and the back surface of the foil base material W in the treatment path of the foil base material W, respectively, and heats the foil base material W. The cooling panel 23 is arranged on the take-up shaft 46 side of the heater 22 in the processing path so as to face the front surface and the back surface of the foil base material W, respectively, and cools the foil base material W. [Selection diagram] Fig. 1