SYSTEM AND METHOD FOR THE AUTOMATIC DETERMINATION OF CRITICAL PARAMETRIC ELECTRICAL TEST PARAMETERS FOR INLINE YIELD MONITORING

摘要

Inline yield monitoring may include using one or more algorithmic software modules. Inline yield monitoring may involve using two associated algorithmic software modules, such as a learning module and a prediction module. The learning module may learn a critical parametric electrical test (PET) parameter from the data of the probe electrical test yield and PET attribute values. Critical PET parameters can best differentiate between outliers and inliers in the yield data. The prediction module may use the critical PET parameters obtained by the learning module to predict whether a wafer is an inlier or an outlier in the probe test classification.