SYSTEM AND METHOD FOR THE AUTOMATIC DETERMINATION OF CRITICAL PARAMETRIC ELECTRICAL TEST PARAMETERS FOR INLINE YIELD MONITORING

摘要

Inline yield monitoring may include using one or more algorithmic software modules. In-line yield monitoring may include using two related algorithm software modules, such as a learning module and a prediction module. The learning module can learn critical PET (parametric electrical test) parameters from the probe electrical test yield and PET attribute value data. Critical PET parameters can best distinguish between outliers and inliers in yield data. The prediction module may use the critical PET parameters obtained by the learning module to predict whether the wafer is an inlier or an outlier in the probe test classification.