Physical quantity sensors, composite sensors, inertial measurement units, portable electronic devices, electronic devices, and mobiles

摘要

To provide a physical quantity sensor capable of reducing deterioration in detection accuracy caused by inconsistent dimensions in elastic parts.SOLUTION: A gyro sensor 1 comprises: an elastic part 43 having a plurality of beams (first portions 4301a, 4301b, 4301c, 4301d) connected one another via folded parts 430; and a structural body (a fixed driving section 45) facing an external beam (the first portion 4301a) located on the outside among the plurality of beams. Assuming that an interval between the external beam and the structural body is T1 and intervals among the plurality of beams one another are T2, when T2