A susceptor for holding a semiconductor wafer, a method of depositing an epitaxial layer on the surface of a semiconductor wafer, and a semiconductor wafer having an epitaxial layer

摘要

A susceptor for holding a semiconductor wafer during the deposition of an epitaxial layer on a front side of the semiconductor wafer, has a susceptor ring and a susceptor base, and recesses below the susceptor ring in the susceptor base which are arranged in a manner distributed rotationally symmetrically. The radial width of the recesses is greater than the radial width of the susceptor such that the susceptor ring does not completely cover the recesses.