NDIR GAS SENSOR, OPTICAL DEVICE, AND OPTICAL FILTER FOR NDIR GAS SENSOR

摘要

This disclosure provides a NDIR gas sensor comprising: an optical filter having a substrate and a multilayer film; and an infrared light emitting and receiving device having a semiconductor layer of a first conductive type, an active layer, and a semiconductor layer of a second conductive type; where the multilayer film has a structure in which a first layer and a second layer are alternately stacked; the active layer contains InAs_ySb_1-y (0.1≤y≤0.2); and the optical filter includes a wavelength range having an average transmittance of 70% or more with a width of 50 nm or more in a wavelength range of 6 μm to 10 μm, and has a maximum transmittance of 10% or more in a wavelength range of 12.5 μm to 20 μm and an average transmittance of 5% or more and 60% or less in a wavelength range of 12.5 μm to 20 μm.