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Quantum capacitance graphene varactors and fabrication methods
Quantum capacitance graphene varactors and fabrication methods
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机译:量子电容石墨烯变容片和制造方法
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摘要
A plate varactor includes a dielectric substrate and a first electrode embedded in a surface of the substrate. A capacitor dielectric layer is disposed over the first electrode, and a layer of graphene is formed over the dielectric layer to contribute a quantum capacitance component to the dielectric layer. An upper electrode is formed on the layer of graphene. Other embodiments and methods for fabrication are also included.
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