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AN ACTUATING STRUCTURE FOR RAMAN-ATOMIC FORCE MICROSCOPE(AFM) AND A METHOD FOR CONTROLLING THE ACTUATING STRUCTURE
AN ACTUATING STRUCTURE FOR RAMAN-ATOMIC FORCE MICROSCOPE(AFM) AND A METHOD FOR CONTROLLING THE ACTUATING STRUCTURE
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机译:拉曼原子力显微镜(AFM)的致动结构及其控制致动结构的方法
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摘要
A driving structure for a Raman-atomic force microscope according to an embodiment includes a sample substrate on which a sample is placed, and a platform disposed under the sample substrate to control a position of the sample substrate, and the platform is the sample The position of the substrate can be controlled in units of micrometers or nanometers.
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