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INTEGRATED CHIRPED-GRATING SPECTROMETER-ON-A-CHIP

机译:集成啁啾光栅光谱仪 - 芯片

摘要

A spectral sensor and a method for forming the spectral sensor is disclosed. The spectral sensor includes a planar waveguide on a substrate; a restriction mechanism that restricts a range of angles of incidence of light impinging onto the chirped input coupling grating; the chirped input grating formed to couple incident light into the planar waveguide, wherein the chirped input coupling grating comprises a first transverse chirp to provide a spectrally selective coupling of incident light Into the planar waveguide; a propagation region to filter out light that is not coupled into the planar waveguide; a detector array arranged on the opposite side of the propagation region from the chirped input coupling grating to receive light coupled out of the planar waveguide and produce output signals representative of the light; and an electrical circuit to readout output signals from the detector array.
机译:公开了一种光谱传感器和用于形成光谱传感器的方法。光谱传感器包括基板上的平面波导;限制机制,限制撞击啁啾输入联轴器光栅的光的一系列发生率的角度;啁啾输入光栅形成为将入射光耦合到平面波导中,其中啁啾输入耦合光栅包括第一横向啁啾,以提供入射光进入平面波导的光谱选择性耦合;一种过滤外光的传播区域,其不耦合到平面波导中;一种检测器阵列,布置在传播区域的相对侧,从啁啾输入联接光栅接收从平面波导耦合的光并产生表示光的输出信号;和一个电路,用于从检测器阵列读出输出信号。

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