Integrated active devices with improved optical coupling to dielectric waveguides

摘要

The optical device comprises first, second and third elements fabricated on a common substrate.The first element comprises an active waveguide structure for supporting the first optical mode, the second element comprises a passive waveguide structure supporting the second optical mode, the third element being at least partially coupled to the first element, and an intermediate waveguide structure.If the first optical mode differs beyond the second optical mode and the predetermined amount, at least one tapered waveguide structure of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode.The interalignment of the first, second and third elements is defined using a lithographic alignment mark.