Perovskite-induced Ultrasensitive and Highly Stable Humidity Sensor Systems prepared by Aerosol Deposition at Room Temperature

摘要

A perovskite-induced ultra-sensitive and high stability humidity sensor system by aerosol deposition at room temperature is disclosed. The present invention proposes a new capacitive-type humidity sensor using a novel material and manufacturing process for practical application in sensitive environments and cost-effective functional devices requiring ultra-sensing performance. Various ceramics (Al ₂ O ₃ , TiO ₂ , and BaTiO ₃ ) together with metal halide perovskite (CsPbBr ₃ and CsPb ₂ Br ₅ ) were first selected as the sensing material, and nanocomposite powders ( nanocomposite powders) are deposited by an aerosol deposition (AD) process at room temperature at 23°C. _{The state-of-the-art CsPb 2} Br ₅ /BaTiO ₃ nanocomposite humidity sensor manufactured by AD process at 23° C. room temperature for several minutes has significant humidity sensing performance compared to _{CsPbBr 3} /Al ₂ O ₃ and CsPbBr ₃ /TiO _{2 sensors.} Indicates an increase. Excellent linearity (0.991), excellent humidity sensitivity (high sensitivity 21426 pF/RH%), fast response/recovery time (5s), low hysteresis of 1.7%, and excellent stability over a wide range of relative humidity. It is obtained because of its high porous structure, effective charge separation, and water-resistant _{properties of CsPb 2} Br _5. The synergistic combination of AD technology and perovskite-based nanocomposites could potentially be used in the development of multifunctional sensing devices.