RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR SETTING AND ADJUSTING PARAMETERS OF ELECTRODES IN ELECTROSTATIC CHUCKS

摘要

A substrate processing system for processing a substrate within a processing chamber is provided and includes a source terminal, a substrate support, and a tuning circuit. The substrate support includes a first electrode and a second electrode that hold the substrate and receive power from a power source through a source terminal. The tuning circuit is connected to either the first electrode or the second electrode. A tuning circuit is assigned to tune the signals provided to the first electrode. The tuning circuit includes at least one of a first set of impedances or a second set of impedances. The first set of impedances are connected in series between the first electrode and the power source and receive a first signal from the power source through a source terminal. The second set of impedances is connected between the output of the power source and the reference terminal and receives a first signal from the power source through the source terminal.