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SENSOR, STRAIN DETECTION SENSOR, PRESSURE SENSOR, MICROPHONE, SENSOR PRODUCTION METHOD, AND STRAIN DETECTION SENSOR PRODUCTION METHOD

机译:传感器,应变检测传感器,压力传感器,麦克风,传感器生产方法和应变检测传感器生产方法

摘要

A sensor (100) is provided with: a film part (2) that is capable of being deformed by an external force; a support (3) that supports the film part; and a magnetic reluctance element part (R1) that is provided on the film part (2) and that includes at least one unit element (10). The unit element (10) has: a first magnetic layer that has a magnetization direction which changes according to deformation of the film part (2); a second magnetic layer that has a fixed magnetization direction; and an intermediate layer that is disposed between the first magnetic layer and the second magnetic layer. The film part (2) is provided so as to include, in the plane thereof, portions that have different thicknesses.
机译:传感器(100)设置有:能够通过外力变形的薄膜部分(2);支持电影部分的支撑(3);和设置在膜部(2)上的磁磁阻元件部分(R1),并且包括至少一个单元元件(10)。单元元件(10)具有:第一磁性层,其具有根据膜部件(2)的变形而改变的磁化方向;具有固定磁化方向的第二磁层;和设置在第一磁层和第二磁性层之间的中间层。膜部(2)设置成在其平面中包括具有不同厚度的部分。

著录项

  • 公开/公告号WO2021079669A1

    专利类型

  • 公开/公告日2021-04-29

    原文格式PDF

  • 申请/专利权人 MURATA MANUFACTURING CO. LTD.;

    申请/专利号WO2020JP35466

  • 发明设计人 KUBOTA MASASHI;TAKEUCHI MASAKI;

    申请日2020-09-18

  • 分类号G01L1/12;G01L9/16;H04R15;H01L41/12;

  • 国家 JP

  • 入库时间 2022-08-24 18:29:29

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