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SENSOR, STRAIN DETECTION SENSOR, PRESSURE SENSOR, MICROPHONE, SENSOR PRODUCTION METHOD, AND STRAIN DETECTION SENSOR PRODUCTION METHOD
SENSOR, STRAIN DETECTION SENSOR, PRESSURE SENSOR, MICROPHONE, SENSOR PRODUCTION METHOD, AND STRAIN DETECTION SENSOR PRODUCTION METHOD
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机译:传感器,应变检测传感器,压力传感器,麦克风,传感器生产方法和应变检测传感器生产方法
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摘要
A sensor (100) is provided with: a film part (2) that is capable of being deformed by an external force; a support (3) that supports the film part; and a magnetic reluctance element part (R1) that is provided on the film part (2) and that includes at least one unit element (10). The unit element (10) has: a first magnetic layer that has a magnetization direction which changes according to deformation of the film part (2); a second magnetic layer that has a fixed magnetization direction; and an intermediate layer that is disposed between the first magnetic layer and the second magnetic layer. The film part (2) is provided so as to include, in the plane thereof, portions that have different thicknesses.
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