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How to improve the resolution of maskless lithography while maintaining high image contrast

机译:如何提高掩模光刻的分辨率,同时保持高图像对比度

摘要

Embodiments described herein relate to a software application platform that improves the resolution of image patterns on a substrate. The application platform method includes executing an algorithm to provide different target polygons to form a pattern on the target. The minimum feature size that can be formed by the DMD is determined. For each of the target polygons smaller than the minimum feature size, it is decided to line bias or shot bias one or more target polygons to achieve an acceptable exposure contrast at the target polygon boundary. One or more target polygons that are less than the minimum feature size are biased to form a digitized pattern on the substrate. Electromagnetic radiation is transmitted to be reflected from the first mirror when the center of the first mirror of the DMD is within one or more target polygons.
机译:这里描述的实施例涉及一种软件应用平台,其改善基板上的图像图案的分辨率。应用平台方法包括执行算法以提供不同的目标多边形以在目标上形成模式。确定可以由DMD形成的最小特征大小。对于小于最小特征尺寸的每个目标多边形,它决定线偏置或射击偏置一个或多个目标多边形,以在目标多边形边界处实现可接受的曝光对比度。小于最小特征大小的一个或多个目标多边形被偏置以在基板上形成数字化图案。当DMD的第一镜的中心在一个或多个目标多边形内时,电磁辐射被传递到从第一镜子反射。

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