MEMS transducer of phased array coupled to flexible substrate using carbon nanotubes for conformal ultrasonic scanning

摘要

PROBLEM TO BE SOLVED: To provide a plurality of micro-electro-mechanical system (MEMS) transducers in a phased array that are coupled to a flexible substrate using carbon nanotubes (CNTs) for conformal ultrasound scanning.SOLUTION: Each transducer comprises a cantilever, magnetic material deposited on the cantilever, and a solenoid positioned relative to the magnetic material. The carbon nanotubes are grown on the cantilever and mechanically couple the transducer to one side of the flexible substrate. The other side of the flexible substrate is applied to a surface of a part under inspection, and the transducers are electrically connected to a processor to cause movement of the cantilevers when the solenoids are energized by the processor. The movement of the cantilevers results in movement of the carbon nanotubes, which imparts to the flexible substrate a force that results in ultrasound waves, which permeate the part. Returns from the ultrasound waves are interpreted by the processor to generate images of the part.SELECTED DRAWING: Figure 1A