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RECESSED STRUCTURE CAPABLE OF BEING CONVENIENTLY MONITORED ONLINE, AND MANUFACTURING METHOD THEREOF

机译:能够方便地监控的凹陷结构,以及其制造方法

摘要

A recessed structure capable of being conveniently monitored online comprises a medium layer I, and a medium layer II positioned above the medium layer I. The medium layer I comprises a metal through hole, and a metal contact layer positioned above the metal through hole. The medium layer II comprises a conical recess positioned above the metal contact layer. The conical recess has inclined sidewalls. The horizontal cross section area of the conical recess gradually increases in a direction away from the metal contact layer. A reflective film covers the inclined sidewall. The recessed structure capable of being conveniently monitored online and the manufacturing method thereof enable quick identification of defects in a recessed structure by means of alternating bright and dark annular images formed by a monitoring system.
机译:能够方便地监测在线的凹陷结构包括介质层I,位于介质层I上方的介质层II。介质层I包含金属通孔,以及位于金属通孔上方的金属接触层。介质层II包括位于金属接触层上方的锥形凹槽。锥形凹槽具有倾斜的侧壁。锥形凹槽的水平横截面区域逐渐增加在远离金属接触层的方向上。反射膜覆盖倾斜的侧壁。能够方便地在线监测的凹陷结构,并且其制造方法能够通过通过监测系统形成的变形和深环图像来快速识别凹陷结构中的缺陷。

著录项

  • 公开/公告号WO2021068388A1

    专利类型

  • 公开/公告日2021-04-15

    原文格式PDF

  • 申请/专利权人 SHANGHAI IC R & D CENTER CO. LTD.;

    申请/专利号WO2019CN122972

  • 发明设计人 KANG XIAOXU;

    申请日2019-12-04

  • 分类号H01L23/544;

  • 国家 CN

  • 入库时间 2022-08-24 18:16:36

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