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RECESSED STRUCTURE CAPABLE OF BEING CONVENIENTLY MONITORED ONLINE, AND MANUFACTURING METHOD THEREOF
RECESSED STRUCTURE CAPABLE OF BEING CONVENIENTLY MONITORED ONLINE, AND MANUFACTURING METHOD THEREOF
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机译:能够方便地监控的凹陷结构,以及其制造方法
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摘要
A recessed structure capable of being conveniently monitored online comprises a medium layer I, and a medium layer II positioned above the medium layer I. The medium layer I comprises a metal through hole, and a metal contact layer positioned above the metal through hole. The medium layer II comprises a conical recess positioned above the metal contact layer. The conical recess has inclined sidewalls. The horizontal cross section area of the conical recess gradually increases in a direction away from the metal contact layer. A reflective film covers the inclined sidewall. The recessed structure capable of being conveniently monitored online and the manufacturing method thereof enable quick identification of defects in a recessed structure by means of alternating bright and dark annular images formed by a monitoring system.
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