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NEUTRAL SUB-LAYER FOR A BLOCK COPOLYMER AND POLYMER STACK COMPRISING SUCH A SUB-LAYER COVERED WITH A BLOCK COPOLYMER FILM
NEUTRAL SUB-LAYER FOR A BLOCK COPOLYMER AND POLYMER STACK COMPRISING SUCH A SUB-LAYER COVERED WITH A BLOCK COPOLYMER FILM
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机译:用于嵌段共聚物和聚合物叠层的中性子层,包括用嵌段共聚物膜覆盖的这种子层
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摘要
The invention relates to a homopolymer or (co)polymer sub-layer to be deposited on the surface of a substrate and covered by a block copolymer, said sub-layer being characterized in that it has an aliphatic chemical structure, the carbon chain of which comprising a number N of carbon atoms such that N ≥ 6 and N < 12. Such a sub-layer has a neutral surface energy with respect to each of the blocks of the block copolymer and makes it possible to prevent or delay the dewetting of a block copolymer deposited on its surface.
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