Analysis of at least one type of defect among a number of types of defects between at least two samples

摘要

An aspect of the present invention relates to a method of analyzing at least one type of defect among a plurality of types of defects between at least two samples based on an image of each sample feature of at least one type of defect of the plurality of types of defects. And the method comprises: for each sample, creating at least one minimap representing at least one type of defect among a plurality of types of defects and including a plurality of boxes (E1), the resolution of the minimap is Smaller than the image of the sample, each box of the minimap has a score that is associated with and depends on a number of pixels of the image of the sample and represents the quantity of at least one type of defect; Determining a distance between each minimap representing the same type or types of defects among the plurality of types of defects, the distance between the two minimaps is changed as follows: between the two minimaps in consideration of rotation and/or symmetry. Since it is defined as the minimum distance, each distance between the two minimaps is related to the transformation; includes. Moreover, the analysis of at least one type of defect among a plurality of types of defects between at least two samples is performed taking into account variations related to the distance between each minimap representing at least one type of defect among the plurality of types of defects. do.