Vapor delivery head to prevent stiction of high aspect ratio structures and/or to repair high aspect ratio structures

摘要

A vapor delivery head for wet processing of a substrate comprises a body comprising an upper surface, a lower surface, an upper plenum and a lower plenum. A first bore is disposed on the upper surface of the body and is fluidly connected to the upper plenum to supply the heated fluid. A second bore is disposed on the upper surface of the body and is connected to the upper plenum to remove heated fluid. A third bore is disposed on the upper surface of the body and is connected to the lower plenum to receive the gas mixture. A plurality of through holes passing through the lower surface of the body are in fluid communication with the lower plenum.