K-NEAREST NEIGHBOR-BASED METHOD AND SYSTEM TO PROVIDE MULTI-VARIATE ANALYSIS ON TOOL PROCESS DATA

摘要

The server computer system generates a reference fingerprint for the first tool executing the recipe. The server computer system uses the reference data associated with the first tool to run in the parameters to generate the reference fingerprint. The reference fingerprint includes a target baseline and acceptable ranges based on the target baseline. The server computer system determines, based on a comparison of the sample data, to a reference fingerprint, whether the sample data associated with the second tool executing the recipe is performing within the parameters. The second tool may be the first tool or another tool of the same type as the first tool. The server computer system provides a rating of the second tool to at least one of the user or the system based on the comparison of the sample data to the reference fingerprint. The rating indicates whether the second tool is performing within the parameters.