WAVELENGTH DEMULTIPLEXER WITH ARRAYED WAVEGUIDE GRATING AND METHODS OF MANUFACTURING

摘要

The present invention includes a first slab 20 connected to the input waveguide 10, an array waveguide 30 connected to the first slab 20, and a second slab 40 connected to the array waveguide 30, An array waveguide grating-type wavelength demultiplexing device comprising an output waveguide 50 and an inclined surface 60 connected to the second slab, and a manufacturing method thereof, wherein the inclined surface 60 includes an upper clad 41 and a lower clad 42 It relates to an array waveguide grating type wavelength demultiplexing device, characterized in that it is made of the same material as ).