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VISIBLE-SWIR HYPER SPECTRAL PHOTODETECTORS WITH REDUCED DARK CURRENT
VISIBLE-SWIR HYPER SPECTRAL PHOTODETECTORS WITH REDUCED DARK CURRENT
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机译:可见威尔克超光谱光电探测器,暗电流减少
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摘要
A method includes forming an assembly of layers including an InP cap layer on an InGaAs absorption region layer, wherein the InGaAs layer is on an n-InP layer, and wherein an underlying substrate layer underlies the n-InP layer. The method includes removing a portion of the InP cap and n-InP layer by dry etching.
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