Mass flow valve controller and control method with set point filter and linearization system based on valve model

摘要

A valve control system that includes a gain controller for controlling the linear response of a valve. The system includes a linearization control system coupled to the gain controller to determine a gain value to control the linear response time of the valve and a set point filter coupled to the linearization control system to filter a set point value. The linearization control system determines the gain value from the filtered set point value, at least one real-time fluid parameter value, valve model data, an actuator gain, and a valve model gain.