CONCENTRATION MONITORING SYSTEM, CONCENTRATION MANAGEMENT SYSTEM, AND CONCENTRATION MONITORING METHOD

摘要

Provided is a concentration monitoring system which allows continuous concentration monitoring of a processing tank. The concentration monitoring system is provided with a first cycle in which a sample of a processing liquid to which a chemical has been added is taken from a processing tank in which the processing liquid is stored and supplied to a concentration meter which measures the concentration of the chemical, a second cycle in which a chemical solution having a known concentration of the chemical is supplied to the concentration meter, and a control device which controls the first cycle to evaluate the concentration of the chemical in the processing tank on the basis of the concentration of the sample measured by the concentration meter and controls the second cycle to evaluate the precision of the concentration meter on the basis of the concentration of the chemical solution measured by the concentration meter.