Microhead and stage mechanism using the same

摘要

With a simple structure, a micro head having very few backlash is provided.Micro headSpindle 11Sleeve 13CymbalsBacklash absorbing member 17Equipped with color 19The spindle 11 has a male screw partSleeve 13A female screw part 13A corresponding to the male screw part 11a is provided.Sleeve 13Spindle 11Built in.Cymbals 15A part of sleeve 13 is inserted, andThe sleeve 13 is rotatable as a rotating shaftIt is connected to one end of the spindleThe cylindrical backlash absorbing member 17 includesAt the position opposed to the male screw portion 11a of the spindle 11 in the sleeveWith spindle 11 insertedFixed to sleeve 13The backlash absorbing member 17 is composed of a pair ofPrevent backlash of spindle 11.