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Lighting system, optical measuring device and method for metrological measurement of workpieces

机译:照明系统,光学测量装置和工件测量测量方法

摘要

The invention concerns a 26c lighting system for optical measuring devices 10 for metrological measurement of workpieces 14 comprising a wide-band light source 3 and in light direction from light source 3 to the workpiece 14 to be measured at least one first transverse converter 2a for the lighting and at least one first chromatic gradient filters 1a for the illumination, with the lighting system 26c in the direction of light from the light source 3 to the workpiece 14 to be measured after at least one chromatic gradient filters 1a at least one more,includes a second cross-sectional converter 2b for the illuminating lamp. The invention also concerns an optical measuring device 10 for the metrological measurement of workpieces 14 with a above mentioned lighting system 26c, with the optical measuring device 10 having a CMOS sensor operated in s/w mode, thus avoiding colour filtering, and a method for metrological measurement of workpieces 14 by means of an appropriate optical measuring device 10, the procedure having the following steps: positioning of workpiece 14 within the measuring range of the optical measuring device 10;illumination of the workpiece by means of the inventive lighting system 26c in the form of illumination and/or illumination, the first chromatic flow filter 1a being in a first lateral position relative to the optical axis of the lighting system 26c; Activate recording of the workpiece using the CMOS sensor of the optical measuring device 10; evaluate the recording with respect to a contrast goods criterion; repeat the previous steps "illuminate the workpiece";"Activities of an uptake" and "Evaluation of uptake" in another lateral position of the first chromatic flow filter 1a until the contrast goods criterion exceeds a desired threshold value or a predefined threshold value; storage of the control data of the contrast goods criterion for well-located lateral position of the first chromatic flow filter 1a together with information and/or data of workpiece 14 in a process setup file.
机译:本发明涉及一种用于光学测量装置10的26C照明系统,用于工件14的计量测量,包括宽带光源3以及从光源3到工件14的光学方向,以测量至少一个第一横向转换器2a照明和用于照明的至少一个第一色梯度滤波器1a,在从光源3的光的方向上沿着从光源3到工件14的光学方向,在至少一个色梯度过滤器1a至少更多的情况下,包括用于照明灯的第二横截面转换器2b。本发明还涉及一种用于使用上述照明系统26c的工件14的工件14的计量测量的光学测量装置10,光学测量装置10具有以S / W模式操作的CMOS传感器,从而避免滤色器和方法通过适当的光学测量装置10的工件14的计量测量,该过程具有以下步骤:将工件14的定位在光学测量装置10的测量范围内;通过本发明的照明系统26c的工件照射照明和/或照明的形式,第一彩色流过滤器1a相对于照明系统26c的光轴处于第一横向位置;使用光学测量装置10的CMOS传感器激活工件的记录;评估拍摄对比物标准的记录;重复前一步“照亮工件”;“摄取的活性”和第一个横向位置的另一个横向位置,直到对比物标准超过所需的阈值或预定阈值;存储对造影器标准的控制数据,用于将第一彩色流动滤波器1a的良好定位位置与工件设置文件中的工件14的信息和/或数据一起存储。

著录项

  • 公开/公告号DE102019214865A1

    专利类型

  • 公开/公告日2021-04-01

    原文格式PDF

  • 申请/专利权人 CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH;

    申请/专利号DE201910214865

  • 发明设计人 AKSEL GÖHNERMEIER;

    申请日2019-09-27

  • 分类号G01B11;G01M11;G02B5/20;G02B26;G02B27/09;F21V9/40;G03B15/02;G02B7/04;

  • 国家 DE

  • 入库时间 2022-08-24 18:02:15

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