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STANDARD PLAN AND PROCEDURES FOR THE AREA

机译:该地区的标准计划和程序

摘要

An MRAM cell has a lower electrode, a metal tube tube tube passage and an upper electrode. The metal furnace tunnel has a side area between the lower electrode and the upper electrode. A thin layer on the side surface consists of one or more compounds of a metal found in one of the electrodes. The thin layer has a lower conductivity than the MTJ. The electrode metal may have been isolated at the side during the MTJ structuring and subsequently reacted to form a connection,which has a lower conductivity than a nitride of electrode metal. The thin layer may contain an oxide that is separated over the newly separated electrode metal. The thin layer may include a compound of the electrode metal which is separated over the newly separated electrode metal. A silicon nitride buffer can be formed over the thin layer without pictures of nitrides of the electrode metal.
机译:MRAM电池具有下电极,金属管管通道和上电极。金属炉隧道在下电极和上电极之间具有侧面区域。侧面上的薄层包括在其中一个电极中发现的一种或多种金属化合物。薄层具有比MTJ的较低的电导率。在MTJ结构期间,电极金属可以在侧面被隔离,随后反应形成连接,其具有比电极金属的氮化物更低的导电性。薄层可含有在新分离的电极金属上分离的氧化物。薄层可包括电极金属的化合物,其在新分离的电极金属上分离。可以在薄层上形成氮化硅缓冲液而没有电极金属的氮化物的图片。

著录项

  • 公开/公告号DE102020108814A1

    专利类型

  • 公开/公告日2021-04-01

    原文格式PDF

  • 申请/专利权人 TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.;

    申请/专利号DE202010108814

  • 发明设计人 JOUNG-WEI LIOU;CHIN KUN LAN;

    申请日2020-03-31

  • 分类号H01L43/08;H01L27/22;H01L27/24;H01L45;

  • 国家 DE

  • 入库时间 2022-08-24 18:02:11

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