A sharpening method for a probe tip of an Atomic Force Microscope (AFM) includes the steps of dripping a prepared slurry on a glass slide to form a droplet on the glass slide, where particles of the prepared slurry are diamond powder; infiltrating the tip to be sharpened with the prepared slurry; setting operation mode of the AFM to tapping in the fluid and lowering the probe into droplet till the probe cantilever beam is immersed completely in the droplet; setting vibration parameters, scanning parameters, and sharpening time, performing tip sharpening; and evaluating the sharpening results, and finishing sharpening. When the AFM works in a tapping mode in fluid, the tip of the self-excited oscillating probe is sharpened under the grinding effect of the diamond particles. The method is simple and effective, and easy to implement.
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