A microfabricated structure (100) comprising: a substrate (108); a first clamping layer (104) overlying the substrate (108); a deflectable membrane (102) overlying the first clamping layer (104); anda second clamping layer (106) overlying the deflectable membrane (102), wherein a cavity is disposed in the substrate (108) and the first clamping layer (104) and in the first clamping layer (104) forms a cavity sidewall similar to a first Facing region of the cavity disposed between the substrate (108) and the deflectable membrane (102); wherein a portion of the second clamping layer (106) overlaps a second region of the cavity (109) formed in the substrate (108) is arranged; andwherein the cavity side wall of the first clamping layer (104) overlaps the substrate (108) and does not overlap the second region of the cavity (109), wherein a second cavity is arranged in the second clamping layer (106) and a cavity side wall is arranged in the second clamping layer (106) is formed, wherein a roughness of the cavity side wall of the first clamping layer (104) is greater than a roughness of the cavity side wall of the second clamping layer (106).
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