PURGE DEVICE, PURGE SYSTEM, PURGE METHOD, AND CONTROL METHOD IN PURGE SYSTEM

摘要

A purge device (30) configured to purge the inside of a storage container (F) storing a product with purge gas includes: a plurality of placing units (31) each configured to place the storage container thereon; a plurality of supply pipes (33) configured to supply purge gas to the storage containers placed on the corresponding placing units; a main pipe (41) connected to the supply pipes and configured to supply the purge gas to the supply pipes; and a MFC (43) configured to adjust the flow rate of the purge gas in the main pipe.