A system that purifies low-purity hydrogen fluoride into high-purity hydrogen fluoride by using the difference in density and specific gravity of the material, and a new material that adsorbs impurities

摘要

The present invention is a system for purifying low-purity hydrogen fluoride into high-purity hydrogen fluoride by using the difference in density and specific gravity of the material, and as a new material for adsorbing impurities, Hydrogen fluoride produced and brought in from around the world for use in conventional semiconductor processing is unusable because of its concentration and purity. The present invention eliminates hydrogen fluoride, which has a problem as described above, from a complex purification facility. Edible oil (4) and materials with different specific gravity (10) are built into the refining container (2) and arranged in multi-level layers. Liquid hydrogen fluoride (1) is injected from the upper side of the new material (100) that adsorbs impurities composed of materials (10) having different specific gravity from cooking oil (4) in a multi-stage layer, and liquid hydrogen fluoride (1) using a specific gravity difference While sedimenting to the lower side To achieve the equilibrium of substances while confining trace impurities contained in low-purity liquid hydrogen fluoride (1) to the viscosity of the new material (100) that adsorbs impurities composed of edible oil (4) and substances having different specific gravity (10). By adsorbing and removing Characterized in that, it is characterized in that only high purity liquid hydrogen fluoride 600 is settled down to be collected or supplied to a semiconductor processing system through a pipe (3) to be used in industry. It is a new material that adsorbs impurities and a system that purifies low-purity hydrogen fluoride into high-purity hydrogen fluoride by using the difference in density and specific gravity of the material. On the other hand, the present invention is constructed by arranging in a multi-level layer by embedding the edible oil (4) and the material (10) having different specific gravity in the refining container (2). A low-purity etching gas 500 HF is injected from the lower side of the new material 100 that adsorbs impurities composed of edible oil 4 and a material 10 having different specific gravity in a multi-stage layer, and using the difference in specific gravity Etching gas (500) HF generates buoyancy against the new material (100) that adsorbs impurities composed of a material (10) having a different specific gravity from the cooking oil (4) and moves upward. To achieve equilibrium of materials while confining trace impurities contained in low-purity etching gas 500 HF to the viscosity of the new material 100 that adsorbs impurities composed of materials 10 with different specific gravity from cooking oil 4 By adsorbing and removing Characterized in that it is characterized by manufacturing only high purity etching gas (700) HF and moving it to the upper side for collection or supplying it to a semiconductor processing system through a pipe to be used in industry. It is a new material that adsorbs impurities and a system that purifies low-purity hydrogen fluoride into high-purity hydrogen fluoride by using the difference in density and specific gravity of the material. In addition, the present invention has not been derived worldwide, Characterized by a new material (100) that adsorbs impurities formed in multiple stages with two or more substances (10) having different specific gravity from the cooking oil (4). It is a new material that adsorbs impurities and a system that purifies low-purity hydrogen fluoride into high-purity hydrogen fluoride by using the difference in density and specific gravity of the material. In addition, the present invention purifies the ultra-high-purity special gas that is widely used in high-tech industries such as optical fiber manufacturing, medical equipment, LCD, LED, as well as semiconductor manufacturing. [Index] The present invention is a system for purifying low-purity hydrogen fluoride into high-purity hydrogen fluoride by using the difference in density and specific gravity of the material, and a new material for adsorbing impurities, Liquid hydrogen fluoride (1) is composed of cooking oil (4) and a substance having different specific gravity (10) inside the refining container (2) and arranged in multi-level layers, Liquid hydrogen fluoride (1) is injected from the upper side of the new material (100) that adsorbs impurities composed of materials (10) having different specific gravity from cooking oil (4) in a multi-stage layer, and liquid hydrogen fluoride (1) using a specific gravity difference Sedimentation to the lower side, To achieve equilibrium of substances while confining trace impurities contained in low-purity liquid hydrogen fluoride (1) to the viscosity of the new material (100) that adsorbs impurities composed of edible oil (4) and substances having different specific gravity (10). Adsorption removal by using the property, A new material (100) that injects low-purity etching gas (500) HF and adsorbs impurities composed of low-purity etching gas (500) HF and a material having a different specific gravity (10) using a specific gravity difference. It generates buoyancy against and moves upwards To achieve equilibrium of materials while confining trace impurities contained in low-purity etching gas 500 HF to the viscosity of the new material 100 that adsorbs impurities composed of materials 10 with different specific gravity from cooking oil 4 Adsorption removal using the property Manufacturing only high-purity etching gas 700 HF and moving it to the upper side for collection or supplying it to a semiconductor processing system through a pipe to be used in industry, A new material (100) that adsorbs impurities composed of multiple stages with two or more substances (10) having different specific gravity from the edible oil (4),