A system that purifies the high-purity hydrogen fluoride by adsorbing and removing trace impurities contained in the hydrogen fluoride by sedimenting liquid hydrogen fluoride in the fluid.

摘要

The present invention is a system for purifying into high purity hydrogen fluoride by adsorbing and removing trace impurities contained in hydrogen fluoride by sedimenting liquid hydrogen fluoride in a fluid, Hydrogen fluoride produced and brought in from around the world for use in conventional semiconductor processing is unusable because of its concentration and purity. The present invention deviates a system for purifying hydrogen fluoride with high purity by adsorbing and removing trace impurities contained in the hydrogen fluoride by sedimenting liquid hydrogen fluoride in a fluid by separating the problematic hydrogen fluoride from a complex refining facility as described above. It is a system that produces hydrogen. The present invention An impurity adsorption oil (4) containing 30% or less of the volume of edible oil is mixed with the mineral purified kaolin and kaolin iron oxide powder, and passed through the piping (3) of the system to a layer with a thickness of 200 mm or more in the refining vessel (2). Recharge, Liquid hydrogen fluoride (1) is injected from the upper layer of the impurity adsorption oil (4) filled in the purification vessel (2), and the injected liquid hydrogen fluoride (1) is settled into the impurity adsorption oil (4) by specific gravity to adsorb impurities. Trace impurities contained in liquid hydrogen fluoride (1) while passing through oil (4) The liquid hydrogen fluoride (1) purified after absorbing, collecting and removing by using the viscosity of the impurity adsorption oil (4) and the nature of the material to move with each other, is lowered to the lower side of the impurity adsorption oil (4) due to the specific gravity difference, and the pipe is closed. It is characterized in that it is recovered through and used in industry It is a system that purifies into high purity hydrogen fluoride by adsorbing and removing trace impurities contained in hydrogen fluoride by sedimenting liquid hydrogen fluoride in the fluid. [Index] The present invention is a system for purifying into high purity hydrogen fluoride by adsorbing and removing trace impurities contained in hydrogen fluoride by sedimenting liquid hydrogen fluoride in a fluid, An impurity adsorption oil containing less than 30% of the volume of edible oil by mixing kaolin refined minerals and kaolin iron oxide powder (4), Filling the tablet container 2 with a layer thickness of 200 mm or more, Liquid hydrogen fluoride (1) is settled into the impurity adsorption oil (4) by specific gravity, Adsorption by using the viscosity of the impurity adsorption oil (4) and the property of the substances to move with each other, Liquid hydrogen fluoride (1) descends to the bottom of the impurity adsorption oil (4) due to the difference in specific gravity and is recovered through pipes and used in industry The impurity adsorption oil (4) may be mixed with vegetable, animal, mineral, and insoluble or chemical substances may be added.