Inspection devices and methods for precision trays with vibration isolation

摘要

Inspection Devices and Methods for Precision Vibration Isolation Plates Devices and methods are described for automatically inspecting precision platters used for vibration isolation. An inspection head including an image capture device and / or an interfering device can be automatically positioned at a plurality of locations on a precision platform. The inspection head may further include a distance sensor that can be used to determine the flatness of part or all of a precision platen surface. The inspection head may further include a marking device to automatically mark nonconforming items formed on the precision platen. Figure for the abstract: Fig. 3