Multi-stage vacuum equipment with stage separation controlled by shape memory alloy actuators

摘要

The present invention relates to a multi-stage vacuum equipment, preferably a two-stage equipment, in which normal operation requires the setting of different pressures, the pressure fluctuation can be achieved by moving the shape memory alloy (SMA) wire of the appropriate element. have. The present invention also discloses a method for operating a multi-stage vacuum equipment controlled by an SMA actuator.