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MULTI-STAGE VACUUM EQUIPMENT WITH STAGES SEPARATION CONTROLLED BY SHAPE MEMORY ALLOY ACTUATOR
MULTI-STAGE VACUUM EQUIPMENT WITH STAGES SEPARATION CONTROLLED BY SHAPE MEMORY ALLOY ACTUATOR
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机译:形状记忆合金作动器控制分级分离的多级真空设备
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摘要
The present invention relates to a multi-stage vacuum equipment, preferably a two-stage equipment, whose normal operation requires different pressures to be set, wherein the pressure variation may be achieved by a Shape Memory Alloy (SMA) wire movement of a suitable element. The invention further discloses a method for operating said multi-stage vacuum equipment controlled by a SMA actuator.
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