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METHODS FOR FABRICATING MECHANICALLY STACKED MULTICOLOR FOCAL PLANE ARRAYS AND DETECTION DEVICES
METHODS FOR FABRICATING MECHANICALLY STACKED MULTICOLOR FOCAL PLANE ARRAYS AND DETECTION DEVICES
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机译:制造机械堆叠的多色焦平面阵列和检测装置的方法
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摘要
Methods of fabricating multicolor, stacked detector devices and focal plane arrays are disclosed. In one embodiment, a method of fabricating a stacked multicolor device includes forming a first detector by depositing a first detector structure on a first detector substrate, and depositing a first ground plane on the first detector structure, wherein the first ground plane is transmissive to radiation in a predetermined spectral band. The method further includes bonding an optical carrier wafer to the first ground plane, removing the first detector substrate, and forming a second detector. The second detector is formed by depositing a second detector structure on a second detector substrate, and depositing a second ground plane on the second detector structure. The method further includes depositing a dielectric layer on one of the first detector structure and the second ground plane, bonding the first detector to the second detector, and removing the second detector substrate.
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