Vector arc revolve transposition method for moving magnetic steel magnetic levitated dual-table system based on revolve balance mass and device thereof

摘要

A dynamic-magnetic-steel magnetic-levitation dual-workpiece stage vector arc stage switching method and device based on rotary balance mass, belonging to the technical field of semiconductor manufacturing apparatuses. The device comprises a support frame (1), a balance mass block (2), a rotary shaft (10), magnetic levitation workpiece stages (4a, 4b), a workpiece stage measurement device and a workpiece stage drive device. Two workpiece stages work between a measurement station (11) and an exposure station (12). Plane gratings (5a, 5b) are used to measure positions of the workpiece stages. the workpiece stages are driven using a magnetic-levitation planar motor. during the switching process of dual-workpiece stages, the planer motor is used for driving the two workpiece stages, so as to achieve rapid single-beat arc stage switching. The method and device solve the problem that an existing stage switching scheme relates to many beats, a long track, many start-stop links and a long stabilization time, thereby reducing stage switching links, shortening a stage switching time, and improving the yield of a photoetching machine.