System and method for in-line monitoring of airborne contamination and process health

摘要

The disclosure describes embodiments of an airborne molecular contamination (AMC) monitoring apparatus. The AMC apparatus includes a manifold having a plurality of inlets and one or more outlets. A sampling tube bus fluidly is coupled to the manifold, the sampling tube bus comprising a plurality of individual sampling tubes, each individual sampling tube being fluidly coupled to one of the plurality of inlets. One or more analyzers are each fluidly coupled to one of the one or more outlets of the manifold to analyze fluid drawn into the manifold through one or more of the plurality of individual sampling tubes. A control and communication system coupled to the one or more analyzers. Other embodiments are described and claimed.