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Apparatus and method for producing single crystal
Apparatus and method for producing single crystal
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机译:制造单晶的装置和方法
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摘要
Problem to be solved: to provide a single crystal manufacturing apparatus capable of maintaining an appropriate growth shape of a single crystal by uniformizing the temperature distribution in the radial direction of a seed crystal or a single crystal grown on the crystal during the crystal growth.Single crystal manufacturing apparatus 100 of the present inventionCrucible 1 consisting of a crucible body 1a and a lid partThe heat insulating member 2 disposed on the upper surface 1BA of the lid part 1b andEquipped withOn the inner surface 1b of the lidA pedestal 1BD for the seed crystal s is installedAdiabatic memberA central through hole 2a arranged at a position which overlaps the pedestal 1BD in plan view from the upper surface 1BA side of the lid part 1b andIt has a heat extraction portion 2B disposed so as to surround the central through hole 2a in plan view.Diagram
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